Direct build-up layer on an encapsulated die package having a moisture barrier structure

ABSTRACT

A packaging technology that fabricates a microelectronic package including build-up layers, having conductive traces, on an encapsulated microelectronic die and on other packaging material that surrounds the microelectronic die, wherein an moisture barrier structure is simultaneously formed with the conductive traces. An exemplary microelectronic package includes a microelectronic die having an active surface and at least one side. Packaging material(s) is disposed adjacent the microelectronic die side(s), wherein the packaging material includes at least one surface substantially planar to the microelectronic die active surface. A first dielectric material layer may be disposed on at least a portion of the microelectronic die active surface and the encapsulation material surface. At least one conductive trace is then formed on the first dielectric material layer to electrically contact the microelectronic die active surface. A barrier structure proximate an edge of the microelectronic package is formed simultaneously out of the same material as the conductive traces.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to apparatus and processes for packagingmicroelectronic dice. In particular, the present invention relates to apackaging technology that fabricates build-up layers on amicroelectronic die and on packaging material which surrounds themicroelectronic die, wherein a moisture barrier structure isincorporated into the build-up layers.

2. State of the Art

Higher performance, lower cost, increased miniaturization of integratedcircuit components, and greater packaging density of integrated circuitsare ongoing goals of the computer industry. As these goals are achieved,microelectronic dice become smaller. Of course, the goal of greaterpackaging density requires that the entire microelectronic die packagebe equal to or only slightly larger (about 10% to 30%) than the size ofthe microelectronic die itself. Such microelectronic die packaging iscalled a “chip scale packaging” or “CSP”.

As shown in FIG. 4, true CSP would involve fabricating build-up layersdirectly on an active surface 204 of a microelectronic die 202. Thebuild-up layers may include a dielectric layer 206 disposed on themicroelectronic die active surface 204. Conductive traces 208 may beformed on the dielectric layer 206, wherein a portion of each conductivetrace 208 contacts at least one contact 212 on the microelectronic dieactive surface 204. External contacts, such as solder balls orconductive pins for contact with an external component (not shown), maybe fabricated to electrically contact at least one conductive trace 208.FIG. 4 illustrates the external contacts as solder balls 214 which aresurrounded by a solder mask material 216 on the dielectric layer 206.However in such true CSP, the surface area provided by themicroelectronic die active surface 204 generally does not provide enoughsurface for all of the external contacts needed to contact the externalcomponent (not shown) for certain types of microelectronic dice (i.e.,logic).

Additional surface area can be provided through the use of aninterposer, such as a substrate (substantially rigid material) or a flexcomponent (substantially flexible material). FIG. 5 illustrates asubstrate interposer 222 having a microelectronic die 224 attached toand in electrical contact with a first surface 226 of the substrateinterposer 222 through small solder balls 228. The small solder balls228 extend between contacts 232 on the microelectronic die 224 andconductive traces 234 on the substrate interposer first surface 226. Theconductive traces 234 are in discrete electrical contact with bond pads236 on a second surface 238 of the substrate interposer 222 through vias242 that extend through the substrate interposer 222. External contacts244 (shown as solder balls) are formed on the bond pads 236. Theexternal contacts 244 are utilized to achieve electrical communicationbetween the microelectronic die 224 and an external electrical system(not shown).

The use of the substrate interposer 222 requires number of processingsteps. These processing steps increase the cost of the package.Additionally, even the use of the small solder balls 228 presentscrowding problems which can result in shorting between the small solderballs 228 and can present difficulties in inserting underfilling betweenthe microelectronic die 224 and the substrate interposer 222 to preventcontamination and provide mechanical stability.

FIG. 6 illustrates a flex component interposer 252 wherein an activesurface 254 of a microelectronic die 256 is attached to a first surface258 of the flex component interposer 252 with a layer of adhesive 262.The microelectronic die 256 is encapsulated in an encapsulation material264. Openings are formed in the flex component interposer 252 by laserabalation through the flex component interposer 252 to contacts 266 onthe microelectronic die active surface 254 and to selected metal pads268 residing within the flex component interposer 252. A conductivematerial layer is formed over a second surface 272 of the flex componentinterposer 252 and in the openings. The conductive material layer ispatterned with standard photomask/etch processes to form conductive vias274 and conductive traces 276. External contacts are formed on theconductive traces 276 (shown as solder balls 278 surrounded by a soldermask material 282 proximate the conductive traces 276).

The use of a flex component interposer 252 requires gluing materiallayers which form the flex component interposer 252 and requires gluingthe flex component interposer 252 to the microelectronic die 256. Thesegluing processes are relatively difficult and may increase the cost ofthe package. Furthermore, the resulting packages have been found to havepoor reliability.

Therefore, it would be advantageous to develop new apparatus andtechniques to provide additional surface area to form traces for use inCSP applications.

BRIEF DESCRIPTION OF THE DRAWINGS

While the specification concludes with claims particularly pointing outand distinctly claiming that which is regarded as the present invention,the advantages of this invention can be more readily ascertained fromthe following description of the invention when read in conjunction withthe accompanying drawings in which:

FIGS. 1a-1 m are side cross-sectional views of embodiments of processesof forming a microelectronic package, according to the presentinvention;

FIG. 2 is side cross-sectional view of detailing moisture encroachmentinto a microelectronic package;

FIGS. 3a-3 q are side cross-sectional views of a method for forming abarrier structure within build-up layers to substantially preventmoisture encroachment into the microelectronic package, according to thepresent invention;

FIG. 4 is a cross-sectional view of a true CSP of a microelectronicdevice, as known in the art;

FIG. 5 is a cross-sectional view of a CSP of a microelectronic deviceutilizing a substrate interposer, as known in the art; and

FIG. 6 is a cross-sectional view of a CSP of a microelectronic deviceutilizing a flex component interposer, as known in the art.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENT

Although FIGS. 1a-1 m, 2, and 3 a-3 q illustrate various views of thepresent invention, these figures are not meant to portraymicroelectronic assemblies in precise detail. Rather, these figuresillustrate semiconductor assemblies in a manner to more clearly conveythe concepts of the present invention. Additionally, elements commonbetween the figures retain the same numeric designation.

The present invention includes a packaging technology that fabricatesbuild-up layers on an encapsulated microelectronic die that has expandedarea larger than that of the microelectronic die. FIGS. 1a-1 jillustrate a first embodiment of a process of forming a microelectronicpackage of the present invention. As shown in FIG. 1a, a protective film104 is abutted against an active surface 106 of a microelectronic die102 to protect the microelectronic die active surface 106 from anycontaminants. The microelectronic die active surface 106 has at leastone contact 108 disposed thereon. The contacts 108 are in electricalcontact with integrated circuitry (not shown) within the microelectronicdie 102. The protective film 104 is preferably a substantially flexiblematerial, such as Kapton® polyimide film (E. I. du Pont de Nemours andCompany, Wilmington, Del.), but may be made of any appropriate material,including metallic films. The protective film 104 may have a weak,thermally stable adhesive, such as silicone, which attaches to themicroelectronic die active surface 106. This adhesive-type film may beapplied prior to placing the microelectronic die 102 in a mold or othersuch equipment used for the encapsulation process. The protective film104 may also be a non-adhesive film, such as a ETFE(ethylene-tetrafluoroethylene) or Teflon® film, which is held on themicroelectronic die active surface 106 by an inner surface of the moldor other such equipment during the encapsulation process.

The microelectronic die 102 is then encapsulated with an encapsulationmaterial 112, such as plastics, resins, epoxies, and the like, as shownin FIG. 1b, that covers a back surface 114 and side(s) 116 of themicroelectronic die 102. The encapsulation of the microelectronic die102 may be achieved by any known process, including but not limited totransfer and compression molding, and dispensing. The encapsulationmaterial 112 provides mechanical rigidity, protects the microelectronicdie 102 from contaminants, and provides surface area for the build-up oftrace layers.

After encapsulation, the protective film 104 is removed, as shown inFIG. 1c, to expose the microelectronic die active surface 106. As alsoshown in FIG. 1c, the encapsulation material 112 is preferably molded toform at least one surface 110 which is substantially planar to themicroelectronic die active surface 106. The encapsulation materialsurface 110 will be utilized in further fabrication steps as additionalsurface area for the formation of build-up layers, such as dielectricmaterial layers and conductive traces.

A first dielectric layer 118, such as epoxy resin, polyimide,bisbenzocyclobutene, and the like, is disposed over the microelectronicdie active surface 106, the contacts 108, and the encapsulation materialsurface 110, as shown in FIG. 1d. The dielectric layers of the presentinvention are preferably filled epoxy resins available from IbidenU.S.A. Corp., Santa Clara, Calif. U.S.A. and Ajinomoto U.S.A., Inc.,Paramus, N.J., U.S.A. The formation of the first dielectric layer 118may be achieved by any known process, including but not limited to filmlamination, spin coating, roll-coating, and spray-on deposition.

As shown in FIG. 1e, a plurality of vias 122 are then formed through thefirst dielectric layer 118. The plurality of vias 122 may be formed anymethod known in the art, including but not limited to laser drilling,photolithography, and, if the first dielectric layer 118 is photoactive,forming the plurality of vias 122 in the same manner that a photoresistmask is made in a photolithographic process, as known in the art.

A plurality of conductive traces 124 is formed on the first dielectriclayer 118, as shown in FIG. 1f, wherein a portion of each of theplurality of conductive traces 124 extends into at least one of saidplurality of vias 122 to make electrical contact with the contacts 108.The plurality of conductive traces 124 may be made of any applicableconductive material, such as copper, aluminum, and alloys thereof. Asshown in FIG. 1f, at least one conductive trace extends adjacent themicroelectronic die active surface 106 and adjacent said encapsulationmaterial surface 110.

The plurality of conductive traces 124 may be formed by any knowntechnique, including but not limited to semi-additive plating andphotolithographic techniques. An exemplary semi-additive platingtechnique can involve depositing a seed layer, such as sputter-depositedor electroless-deposited metal on the first dielectric layer 118. Aresist layer is then patterned on the seed layer, followed byelectrolytic plating of a layer of metal on the seed layer exposed byopen areas in the patterned resist layer. The patterned resist layer isstripped and portions of the seed layer not having the layer of metalplated thereon is etched away. Other methods of forming the plurality ofconductive traces 124 will be apparent to those skilled in the art.

As shown in FIG. 1g, a second dielectric layer 126 is disposed over theplurality of conductive traces 124 and the first dielectric layer 118.The formation of the second dielectric layer 126 may be achieved by anyknown process, including but not limited to film lamination,roll-coating and spray-on deposition.

As shown in FIG. 1h, a plurality of second vias 128 are then formedthrough the second dielectric layer 126. The plurality of second vias128 may be formed any method known in the art, including but not limitedto laser drilling and, if the second dielectric layer 126 isphotoactive, forming the plurality of second vias 128 in the same mannerthat a photoresist mask is made in a photolithographic process, as knownin the art.

If the plurality of conductive traces 124 is not capable of placing theplurality of second vias 128 in an appropriate position, then otherportions of the conductive traces are formed in the plurality of secondvias 128 and on the second dielectric layer 126, another dielectriclayer formed thereon, and another plurality of vias is formed in thedielectric layer, such as described in FIGS. 1f-1 h. The layering ofdielectric layers and the formation of conductive traces can be repeateduntil the vias are in an appropriate position. Thus, portions of asingle conductive trace be formed from multiple portions thereof and canreside on different dielectric layers.

A second plurality of conductive traces 132 may be formed, wherein aportion of each of the second plurality of conductive traces 132 extendsinto at least one of said plurality of second vias 128. The secondplurality of conductive traces 132 each include a landing pad 134 (anenlarged area on the traces demarcated by a dashed line 140), as shownin FIG. 1i.

Once the second plurality of conductive traces 132 and landing pads 134are formed, they can be used in the formation of conductiveinterconnects, such as solder bumps, solder balls, pins, and the like,for communication with external components (not shown). For example, asolder mask material 136 can be disposed over the second dielectriclayer 126 and the second plurality of conductive traces 132 and landingpads 134. A plurality of vias is then formed in the solder mask material136 to expose at least a portion of each of the landing pads 134. Aplurality of conductive bumps 138, such as solder bumps, can be formed,such as by screen printing solder paste followed by a reflow process orby known plating techniques, on the exposed portion of each of thelanding pads 134, as shown in FIG. 1j.

It is understood that the encapsulation material 112 is only one exampleof a packaging material that may be used. For example, a microelectronicpackage core 142 could be utilized as a packaging material along withthe encapsulation material 112 in the fabrication of the microelectronicpackage, such as illustrated in FIG. 1k. The microelectronic packagecore 142 preferably comprises a substantially planar material. Thematerial used to fabricate the microelectronic package core 142 mayinclude, but is not limited to, a Bismaleimide Triazine (“BT”) resinbased material, an FR4 material (a flame retarding glass/epoxymaterial), and various polyimide materials. Furthermore, a heat spreader144 could be utilized as a packaging material along with theencapsulation material 112 in the fabrication of the microelectronicpackage, such as illustrated in FIG. 1l. The material used tofabrication the heat spreader 144 may include any conductive and mayinclude but is not limited to, copper, aluminum, and alloys thereof.

FIG. 1m illustrates a plurality of microelectronic dice 102 encapsulatedwith encapsulation material 112. The layer(s) of dielectric material andconductive traces comprising the build-up layer is simply designatedtogether as build-up layer 152 in FIG. 1m. The individualmicroelectronic dice 102 are then singulated along lines 154 (cut)through the build-up layer 152 and the encapsulation material 112 toform at least one singulated microelectronic die package, such as shownin FIG. 1j. It is, of course, understood that the microelectronicpackage core 142 of FIG. 1k can be present and be singulatedtherethrough to form the microelectronic package shown in FIG. 1k.Additionally, it is understood that the heat spreader 144 of FIG. 1l canbe present and be singulated therethrough to form the microelectronicpackage shown in FIG. 1l.

Although the build-up layer process illustrated in FIGS. 1a-1 j is aneffective technique for the fabrication of a microelectronic diepackage, it may be susceptible to delamination failure due to moistureencroachment. It has been found that moisture diffuses much more rapidlyalong the interfaces (shown with arrows 202 and 202′ in FIG. 2) betweenthe dielectric layers (i.e., dielectric layers 118, 126, and 136) thanthrough the dielectric layer material itself.

FIGS. 3a-3 o illustrate a method of forming a barrier structureaccording to the present invention to lessen or eliminate the interlayermoisture encroachment and delamination, as described for FIG. 2. FIG. 3aillustrates a microelectronic die and packaging materials generallyafter fabrication steps shown in FIGS. 1a-1 c. Thus, FIG. 3a shows amicroelectronic die 302 having an active surface 306 and at least onecontact 308. FIG. 3a further shows a substrate 304, adjacent to themicroelectronic die 302, having a surface 310. The substrate 304generically represents an encapsulation material 112 as described inFIGS. 1a-1 j, a microelectronic packaging core 142 as described in FIG.1k, the heat spreader 144 as described in FIG. 1l, or any applicablepackaging material. The substrate 304 is shown having an edge 312.However, it is understood that the substrate edge 312 may not be formeduntil the individual microelectronic dice 302 are diced/separated, asdescribed in FIG. 1m.

A first dielectric layer 318 is disposed over the microelectronic dieactive surface 306, the contacts 308, and the substrate surface 310 andat least one first via 322 is formed through the first dielectric layer318 to expose at least one contact 308, as shown in FIG. 3b. A pluralityof conductive traces and barrier structures are then formed on the firstdielectric layer 318. The plurality of conductive traces and barrierstructures are preferably formed by a semi-additive plating techniquecomprising depositing a first seed layer 324 of metal, preferably acopper/titanium alloy, over the first dielectric layer 318 and into thefirst via(s) 322 to cover the contact(s) 308, as shown in FIG. 3c. Afirst resist layer 326 is then patterned on the first seed layer 324, asshown in FIG. 3d. A first resist layer 326 is patterned with an firstopening 328 including the first via 322 for subsequently forming aconductive trace and patterned with a first elongate opening 332proximate the substrate edge 312 which extends substantiallyperpendicular to FIG. 3d for subsequently forming a first barrierstructure.

A first layer of metal 330, preferably copper, is deposited, preferablyby electrolytic plating, on the first seed layer 324 in the patternedareas of the first patterned resist layer 326, as shown in FIG. 3e. Thefirst patterned resist layer 326 is then stripped, as shown in FIG. 3f.Portions of the first seed layer 324 not having the first metal layer330 plated thereon is etched away, as shown in FIG. 3g. This results inthe formation of at least one first conductive trace 334 and a firstbarrier structure 336 proximate the substrate edge 312. As shown in FIG.3h, a second dielectric layer 338 is disposed over the first conductivetrace(s) 334, the first barrier structure 336, and the first dielectriclayer 318.

As shown in FIG. 3i, at least one second via 342 is then formed throughthe second dielectric layer 338 to the first conductive trace(s) 334 anda first trench 344 (extending perpendicular to FIG. 3i) is formedthrough the second dielectric layer 338 to the first barrier structure336. The second via(s) 342 and the first trench 344 are formed in thesame formation step by any appropriate method previously discussed.

As shown in FIG. 3j, a second seed layer 352 is deposited over thesecond dielectric layer 338, into the second via(s) 342 to contact thefirst conductive trace(s) 334, and into the first trench 344 to contactthe first barrier structure 336. A second resist layer 354 is thenpatterned on the second seed layer 352, as shown in FIG. 3k. A secondresist layer 354 is patterned with a second opening 356 including thesecond via(s) 342 for subsequently forming a second conductive trace andpatterned with a second elongate opening 358 including the first trench344 and extending perpendicular to FIG. 3d for subsequently forming asecond barrier structure.

A second layer of metal 362 is deposited on the second seed layer 352 inthe patterned areas of the second patterned resist layer 354, as shownin FIG. 3l. The second patterned resist layer 354 is then stripped, asshown in FIG. 3m. Portions of the second seed layer 352 not having thesecond metal layer 362 plated thereon is etched away, as shown in FIG.3n. This results in the formation of at least one second conductivetrace 364 and a second barrier structure 366 proximate the substrateedge 312.

The process is repeated until a build-up layer is complete, which willresult in the formation of the moisture barrier structure 368, as shownin FIG. 3o. The moisture barrier structure 368 comprises the firstbarrier structure 336, the second barrier structure 366, and additionalbarrier structures shown as elements 372, 372′, and 372″ (additionaldielectric layers 374, 374′, 374″, and 374′″ are also shown). Since themoisture barrier structure 368 is fabricated with other conductivetraces and via structures, no extra steps are needed in its formation.Furthermore, the moisture barrier structure 368 substantially blocksmoisture from diffusing into build-up layers along interfaces, aspreviously discussed.

It is, of course, understood that the illustrated embodiment uses atechnique that results in a somewhat zigzag cross-section for themoisture barrier structure 368, as shown in FIG. 3o, a technique may bedevised which stacks a plurality of plugs in order to minimize spaceutilization. Such a moisture barrier structure 380 is shown in FIG. 3pand comprises a plurality of plugs 382, 384, 386, and 388 (additionaldielectric layers 374, 374′, 374″, and 374′″ are also shown).

As shown in FIG. 3q which a top plan view of a complete microelectronicdevice 390, a moisture barrier structure 368 (shown in shadow lines)preferably surrounds the microelectronic die 302 (also shown in shadowline) proximate the substrate edges 312. Thus, the moisture barrierstructure 368 forms a moisture barrier ring that substantially preventsmoisture from encroaching into the microelectronic package from allsides of build-up layers.

Although the present invention is described in terms of a build-up layertechnology, the broad concept of the present invention can be applied toother application where dielectric layers and trace layers arefabrication. Such applications include, but are not limited to, COF(chip-on-flex) and OLGA (organic land grid array) structures, as will beunderstood by those skilled in the art.

Having thus described in detail embodiments of the present invention, itis understood that the invention defined by the appended claims is notto be limited by particular details set forth in the above description,as many apparent variations thereof are possible without departing fromthe spirit or scope thereof.

What is claimed is:
 1. A moisture barrier, comprising: a packagingmaterial having a surface and at least one edge, wherein said packagingmaterial comprises a packaging core material; a first dielectricmaterial layer disposed on at least a portion of said packaging materialsurface; and at least one first barrier structure disposed on said firstdielectric material layer proximate said packaging material edge.
 2. Amoisture barrier, comprising: a packaging material having a surface andat least one edge, wherein said packaging material comprises a heatspreader; a first dielectric material layer disposed on at least aportion of said packaging material surface; and at least one firstbarrier structure disposed on said first dielectric material layerproximate said packaging material edge.
 3. A microelectronic package,comprising: a microelectronic die having an active surface and at leastone side; packaging material adjacent said at least one microelectronicdie side, wherein said packaging material including a surfacesubstantially planar to said microelectronic die active surface andincluding at least one edge; a first dielectric material layer disposedon at least a portion of said packaging material surface; and at leastone first barrier structure disposed on said first dielectric materiallayer proximate said packaging material edge.
 4. The microelectronicpackage of claim 3, further including at least one additional dielectricmaterial layer disposed over said at least one first barrier structureand said first dielectric material layer.
 5. The microelectronic packageof claim 4, further including at least one second barrier structure,wherein at least a portion of said at least one second barrier structureextends through said at least one additional dielectric material layerand contacts said at least one first barrier structure.
 6. Themicroelectronic package of claim 3, wherein said packaging materialcomprises an encapsulation material.
 7. The microelectronic package ofclaim 3, wherein said packaging material comprises a packaging corematerial.
 8. The microelectronic package of claim 3, wherein saidpackaging material comprises a heat spreader.
 9. A microelectronicpackage, comprising: a microelectronic die having an active surface andat least one side; packaging material adjacent said at least onemicroelectronic die side, wherein said packaging material including atleast one surface substantially planar to said microelectronic dieactive surface and including at least one edge; a first dielectricmaterial layer disposed on at least a portion of said packaging materialsurface; at least one first conductive trace disposed on said firstdielectric material layer with a portion of said at least one firstconductive trace extending through said first dielectric material layerto contact said microelectronic die active surface; and at least onefirst barrier structure disposed on said first dielectric material layerproximate said packaging material edge.
 10. The microelectronic packageof claim 9, further including at least one additional dielectricmaterial layer disposed over said at least one first barrier structure,said at least one first conductive trace, and said first dielectricmaterial layer.
 11. The microelectronic package of claim 10, furtherincluding at least one second barrier structure, wherein at least aportion of said at least one second barrier structure extends throughsaid at least one additional dielectric material layer to contact saidat least one first barrier structure.
 12. The microelectronic package ofclaim 10, further including at least one second conductive trace,wherein at least a portion of said at least one second conductive traceextends through said at least one additional dielectric material layerto contact said at least one first conductive trace.
 13. Themicroelectronic package of claim 9, wherein said packaging materialcomprises an encapsulation material.
 14. The microelectronic package ofclaim 9, wherein said packaging material comprises a packaging corematerial.
 15. The microelectronic package of claim 9, wherein saidpackaging material comprises a heat spreader.
 16. A moisture barrier,comprising: a packaging material having a surface and at least one edge;a first dielectric material layer disposed on at least a portion of saidpackaging material surface; and at least one first barrier structuredisposed on said first dielectric material layer proximate saidpackaging material edge, wherein the first barrier structure includes atleast one of a metal seed layer and a first layer of metal.
 17. Amoisture barrier, comprising: a packaging material having a surface andat least one edge; a first dielectric material layer disposed on atleast a portion of said packaging material surface; and at least onefirst barrier structure disposed on said first dielectric material layerproximate said packaging material edge, wherein the first barrierstructure includes a metal seed layer disposed over the first dielectriclayer and a first layer of metal disposed over the metal seed layer,wherein the metal seed layer includes a copper/titanium alloy, andwherein the first layer of metal includes copper.
 18. Themicroelectronic package of claim 3, further including: a firstconductive trace coupled to the die, and wherein the first barrierstructure is disposed in a trench that is extending perpendicular to thefirst conductive trace.
 19. The microelectronic package of claim 3,further including: at least one additional dielectric material layerdisposed over the at least one first barrier structure and the firstdielectric material layer; and at least one second barrier structure,wherein at least a portion of the at least one second barrier structureextends through the at least one additional dielectric material layerand contacts the at least one first barrier structure, and wherein theat least one first barrier structure and the at least one second barrierstructure result in a zigzag cross-section.
 20. The microelectronicpackage of claim 3, further including: at least one additionaldielectric material layer disposed over the at least one first barrierstructure and the first dielectric material layer; and at least onesecond barrier structure, wherein at least a portion of the at least onesecond barrier structure extends through the at least one additionaldielectric material layer and contacts the at least one first barrierstructure, and wherein the at least one first barrier structure and theat least one second barrier structure a comprise plurality of plugs. 21.The microelectronic package of claim 3, further including: a firstconductive trace coupled to the die; and a conductive bump coupled tothe first conductive trace.
 22. The microelectronic package of claim 9,further including: at least one additional dielectric material layerdisposed over the at least one first barrier structure and the firstdielectric material layer; and at least one second barrier structure,wherein at least a portion of the at least one second barrier structureextends through the at least one additional dielectric material layerand contacts the at least one first barrier structure, and wherein theat least one first barrier structure and the at least one second barrierstructure result in a zigzag cross-section.
 23. The microelectronicpackage of claim 9, further including: at least one additionaldielectric material layer disposed over the at least one first barrierstructure and the first dielectric material layer; and at least onesecond barrier structure, wherein at least a portion of the at least onesecond barrier structure extends through the at least one additionaldielectric material layer and contacts the at least one first barrierstructure, and wherein the at least one first barrier structure and theat least one second barrier structure a comprise plurality of plugs. 24.The microelectronic package of claim 9, further including: a firstconductive trace coupled to the die; and a conductive bump coupled tothe first conductive trace.